The 1600-square-metre flexible nanofabrication facility is designed for ultimate flexibility, achieved through the single unobstructed ‘ballroom’ configuration. The design enables research equipment to be reconfigured infinitely to ensure longevity of use. As well as being highly flexible, the facility achieves exceptionally high standards for air-particulate filtration, vibration and acoustic isolation.
- The nanofabrication facility achieves ISO 100 and 1000 cleanroom classifications with ultra-clean laminar air flow from perforated gel-sealed ceiling down through the perforated modular cast aluminium ‘ballroom’ floor into the sub-fab space below. Air is returned via perimeter glass ducts to the plant room above enabling full transparency into the facility from the public viewing corridor and central atrium.
- In the lithography area (ISO class 100 cleanroom), orange film filters protect photo-sensitive processes from 180nM – 300nM wavelength (yellow) light.
- A total of 22, 70 m² stable labs with adjacent control rooms support varying configurations of lasers and microscopes with VC-F rated vibration isolation to independent slabs and CLT timber enclosures. Austenitic stainless-steel fixings and slab reinforcement limit Electro Magnetic Fields (EMF)
- Atrium staircases employ cantilevered Cross Laminated Timber construction to minimise EMF impacts to adjacent stable labs
“From the onset we knew this [building] would represent an incredible technical achievement. Almost four years later, I can say we have achieved all that we had dreamed of. Hassell provided the technical knowhow to interweave all the complexity together, through deep consultation with multitudes of experts.”
— Professor Tim Senden, Director of the School of Physics, ANU